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技术
Tour-U.com
  Recirculation
Features
  • In-bath chemical blend
  • Chemical spiking
  • Temperatures available to 200°C.
  • Process baths in PFA, PVDF, Quartz, and Electro polished SS.
  • Temperature control ± 0.5°C
Advantage
  • Chemical filtration.
  • Temperature Control.
  • Better Etch rate control.
  • Extended bath life.
  • Can eliminate product agitation requirements.
Options
  • Megasonics.
  • Ultrasonics.
  • Chemical concentration control.
Applications
  • Piranha, SC1 and SC2 cleans.
  • Solvent cleaning.
  • Nitride Etch.
  • HF/BOE Etch.
  • Develop.
  • Plating.
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